Precision CMP Polishing Machine
Precision CMP Polishing Machine

CMP Double-Sided Polishing Machine

Product features:

  • Airbag-type pressurization method.
  • Constant temperature control system for grinding & polishing plates.
  • Corrosion resistance.
  • The external gear ring rotates.

KS700YP

KS1200YP

Grinding plate size (mm) - Upper plate

ø700 x ø300 x ø50

Grinding plate size (mm) - Lower plate

ø700 x ø300 x ø50

Process manufacturing

Double-sided Chemical Polishing

Carrier parameters

Z=47 D=Ø240

Number of carriers

6

Maximum machining diameter (mm)

200

Grinding plate speed (r.p.m)

150

Air pressure (MPa)

0.7–0.8

Total power (KW/380V)

22

Gross weight (kg)

Approximately 3,400

External dimensions (W × D × H) mm

2160 x 1880 x 2400

 

Grinding plate size (mm) - Upper plate

ø1220 x ø552 x ø50

Grinding plate size (mm) - Lower plate

ø1220 x ø552 x ø50

Process manufacturing

Double-sided Chemical Polishing

Carrier parameters

Z=47 D=Ø365

Number of carriers

6

Maximum machining diameter (mm)

334

Grinding plate speed (r.p.m)

56

Air pressure (MPa)

0.7–0.8

Total power (KW/380V)

41

Gross weight (kg)

Approximately 7,000

External dimensions (W × D × H) mm

2970 x 2540 x 2735